ZnO-TiO2 composite film for application in surface acoustic wave photocatalytic device

Autor: Xiao-Yuan Fan, 范筱緣
Rok vydání: 2017
Druh dokumentu: 學位論文 ; thesis
Popis: 105
In this paper, the surface acoustic wave (SAW) device with the characteristics of zinc oxide and titanium dioxide films was studied and applied to the photocatalytic degradation of gaseous formaldehyde. An aluminum metal interdigital transducer electrode with a line width of 5 μm was sputtered on the Corning glass substrate; the zinc oxide thin film was deposited by RF magnetron sputtering system as a piezoelectric layer and the titanium dioxide thin film as a photocatalytic layer. X-ray diffraction, fluorescence spectroscopy, field emission scanning electron microscopy and energy dispersive spectrometer were used to analyze the crystal structure, surface morphology and luminescence properties of the films. The frequency response of the device was measured by the network analyzer, and the different voltage was applied to the surface acoustic wave device with composite film to carry out UV light photocatalytic degradation of formaldehyde gas. It was found that Vp-p 1V increases the degradation efficiency of formaldehyde gas over 20%.
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