Implementation and analysis of two-dimensional Guided-mode resonance devices

Autor: Che-Jung Hsu, 許哲榮
Rok vydání: 2017
Druh dokumentu: 學位論文 ; thesis
Popis: 105
This study proposes an implementation method of two-dimensional guided mode resonance (GMR) devices by using two-step nanoimprinting technology, and analyzes their optical properties. We fabricate the polydimethylsiloxane (PDMS) one-dimensional grating mold by the soft lithography; then, the nanoimprint technology was used to replicate the grating structure of UV curing material on a glass substrate. For the first nanoimprinting, we demold when the UV glue was partially cured. Then the PDMS mold is rotated in different angle for the second nanoimprinting to obtain the two-dimensional grating structure. Then, a high refractive index film ZnO is coated on the surface of the grating structure to form the GMR devices. When the devices are rotated and measured in the different angles, the resonance angle and wavelength are changed. The measured results are compared with simulation results obtained by 3D electromagnetic solver (EM Explorer).
Databáze: Networked Digital Library of Theses & Dissertations