Structural Study on BaCeO3 Perovskite Thin Film by Sputtering
| Autor: | David Hsu, 許大衛 |
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| Rok vydání: | 2016 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 104 For proton conduction in the mid- to high-range temperatures (600 – 750C), metal oxide perovskites provide certain characteristics ideal for applications in fuel cells, electrochemical reactors, sensors, and hydrogen purification. The capability of conducting protons in metal oxide perovskites is commonly recognized as a “hopping” mechanism at the microscopic scale, where protons jump from one oxygen atom to another by Coulombic force at high temperatures. In this study, we fabricate BaCeO3 thin films by radio frequency sputtering using metal oxide targets. The films are uniformly deposited on silicon and quartz substrates and have a thickness of roughly 100 nm. After deposition, all films are subjected to rapid thermal annealing at various temperatures and time periods in order to achieve crystalline structures. Specific studies are then perform on the annealed films using surface profiler to determine deposition rate, X-ray diffraction and Raman spectroscopy for the microstructures, and energydispersive X-ray spectroscopy for elemental and chemical compositions. The results of these tests determine a set of optimal parameters for processing BaCeO3 thin films based on the conditions of deposition and thermal annealing. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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