The study on thermoelectric property of Silicon-Rich oxide/Silicon oxide and Si/Graphene multilayers

Autor: YangChi-Chang, 楊啟昌
Rok vydání: 2016
Druh dokumentu: 學位論文 ; thesis
Popis: 104
In our research, the multilayers of silicon rich oxide/silicon dioxide and silicon/graphene were synthesized by reactive magnetron sputtering. The multilayers act as phonon block for the silicon substrate. Our objective is the reduction of thermal conductivity with preservation of electrical conductivity and seebeck coefficient. The structural and physical properties of all multilayers were investigated by TEM, XRD, XPS, TDTR and Harman method. The thermal conductivity successfully drops to accessible range because of phonon scattering in each interface. The variation of proportion and working pressure shows that the existence of silicon nanocrystal might be a key point to preserve power factor. Relation between the formation of multilayers and figure of merit would be discussed. The figure of merit could further increase via replacing the single layer graphene with silicon dioxide. Although the electrical conductivity was still low, it could be further improved after annealing. The result shows the capacity of eco-friendly and low cost Si material with optimized thermoelectric nanostructure.
Databáze: Networked Digital Library of Theses & Dissertations