Characterization of Graphene by Various Etching Process
| Autor: | LIN, SHENG-FENG, 林聖峰 |
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| Rok vydání: | 2017 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 105 Graphene is the thinnest, hardest, transparent conductive materials with unique structure and excellent properties which has a wide range of applications in optoelectronics, gas sensors, capacitor, touch panel, composite, solar cells, and hydrogen storage materials. In this thesis, graphene was synthesized on copper substrate by a thermal CVD using Ar-H2-CH4 gas mixture. The copper foil was annealed pretreatment with 4 hours to flat the copper foil surface and reduce the defects. Then high-quality monolayer graphene were be synthesized. The graphene was transferred with sulfated solution, ferric chloride etching solution and electrochemical method respectively, and the quality and properties of the graphene were compared.The results show that high-quality monolayer graphene can be obtained with 0.125 M NaOH electrochemical method and sulfate etching transfer method. But the rough surface and copper residue on graphene was synthesized by ferrice chloride etching transfer method. The transmittance of graphene transferred by sulfate solution was 97% and the sheet resistance was 624 Ω/□. After 28 days, the sheet resistance, carrier concentration and electron mobility were only slightly changed. The transmittance of graphene by ferrice chloride etching transfer method was 94.5% and the resistance was 1640 Ω/□. After 28 days, sheet resistance significantly increased to 4650 Ω/□. The carrier concentration and the electron mobility decrease with the increasing of the standing time. The resistivity of the graphene is 2.87 x 10-4 Ω/cm by electrochemical transfer method using 0.125 M NaOH. Sulfate solution etching method can obtained better quality, high transmittance, and electrical stability of the graphene film. This method can be used to transfer large area graphene for the industry manufacturing, Improveing the graphene transfer process and reducing the cost. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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