Residual Stress in GZO and IGZO Thin Films Prepared by Radio-Frequency Sputtering Technique
| Autor: | Kuei-Luen Chen, 陳逵綸 |
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| Rok vydání: | 2016 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 104 |
| Databáze: | Networked Digital Library of Theses & Dissertations |
| Externí odkaz: |
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