Design and Implementation of CMOS MEMS Biomedical SoCs

Autor: Po-Hung Kuo, 郭柏宏
Rok vydání: 2015
Druh dokumentu: 學位論文 ; thesis
Popis: 103
To improve efficiency of future medical service, this paper proposes four integrated biomedical system on a chip (SoC) by using MEMS post-process and CMOS IC technology. In the first chip, a 9 mm2 CMOS MEMS continuous glucose sensing SoC (ISCAS 2012) has been designed by integrating glucose-sensitive molecular hydrogel material with a MEMS capacitive bio-sensor by using CMOS MEMS technology. Hydrogel''s expansion and contraction characteristics caused by glucose concentration changes can change capacitance of biosensor. By continuously reading out the capacitance change, human’s glucose concentration can be monitored preciously and continuously. The second chip is the smart CMOS assay SoC (ISSCC 2015), which implements the highly integrated Lab-on-a Chip technologies in an area of 8.89 mm2 die. With using different antibodies, the chip integrated chopper amplifier and microcontroller can quickly detect a variety of biomarkers of human’s whole blood. The third chip is a locomotive SoC (ISSCC 2014). By applying voltage on the water, the electrolysis generates bubbles, which provides the energy for chip’s movement. The locomotive SoC can be integrated with biosensors and bio-actuators as an medical platform for the advanced implantable application in the future. In the forth part, for the fundamental medical research, we have attempted to establish a non-invasive drosophila electrocardiogram (ECG) signal sensing system (PLoS One 2014) by using liquid metal electrode GaIn. The structure of this paper is based on integrating the biosensor, analog front-end circuit, analog-to-digital converter, microcontroller, digital signal processing unit and the wireless transceiver as biomedical sensing SoCs for different medical applications. To implement the SoCs, the CMOS 0.35 and 0.18 um technologies are adopted in this paper. It is expected that using these biomedical sensing SoC can provide next-generation medical services, and improving the efficiency of the use of medical resources.
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