Manufacturing of LED exposure system and surgical shadowless lamp by applying TFMG to design of freeform lens
| Autor: | Yi-Chian Chen, 陳毅謙 |
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| Rok vydání: | 2015 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 103 We adopted the LED (Light-emitting diode) to replace the traditional lamp, and a uniform lens was designed and fabricated for exposure system and surgical shadowless lamp. Exposure process plays an important role in micro-electronics industry, and it is an inevitable trend that conventional mercury lamp could be replaced by UV-LEDs (Ultraviolet). In the exposure process, the irradiance and uniformity of exposure light directly influence the precision of products. Based on the law of conservation of energy and law of refraction, a free-form lens and inclined reflector with uniform light field was designed. Al-Ni-Y Thin film metallic glasses (TFMG) are adopted as UV reflection layers to enhance the irradiance and uniformity. Al-based TFMG with 80~88% reflectance at the UV wave band is coated partially around the lens. The inclined reflector layer was coated with TFMG due to the characteristics of scratch resistance and corrosion resistance. FRED® optical software was applied to analyze. Polydimethylsiloxane (PDMS) with high transmittance was adopted as the lens material, and the mold of freeform lens was fabricated by the 3-D fast printing method for fast optical verification. The experimental results show that the average irradiance and uniformity on the target plane with lens were 8~8.7mW/cm2 and 82~86%, respectively. Then, for the 5-UV-LEDs exposure system comprised freeform lens and 60 degree inclined reflector layer, the 4.5% dimensional deviation of exposed sample was better than 6-8% dimensional deviation of sample exposed by commercial mercury lamp exposure system. This current system shows promising potential to replace the conventional mercury exposure systems. On the other hand, Traditional projection surgical shadowless lamp could cause mercury pollution and increase heat radiation. In this study, LED surgical shadowless lamp was designed. The Ag-Cu-Al TFMG possessing great mechanical strength and antibacterial effect was used as the material of reflective curve layer. For the measured result, the central illuminance (Ec) was 110,500 lux and d50/d10 was 58.9%. For measurement with mask, the shadow dilution with single mask and double masks were 58.96% and 56.16%, respectively. Then, the shadow dilution of lamp with single mask combined with tube and double masks combined with tube were 57.46% and 58.03%, respectively. The simulation and experiment met the rule of IEC-60601-2-41. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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