Comparison Between Polysilicon and Metal Gate in 2D MOSFET Simulation

Autor: Ying-Lung Liang, 梁瀅龍
Rok vydání: 2015
Druh dokumentu: 學位論文 ; thesis
Popis: 103
In this thesis, we use Poisson’s equation and continuity equations to design an equivalent circuit model for 2-D device simulation. The device simulation will be transformed into the circuit simulation. The simulation will become a mixed-level device and circuit simulation. We discuss the advantages and disadvantages between poly-Si gate and metal gate. And the simulation results of poly-Si gate will be compared with those of metal gate. Finally, the subject to be discussed is the non-Bernoulli equation for current expression. We will compare the Bernoulli method with non-Bernoulli method.
Databáze: Networked Digital Library of Theses & Dissertations