Investigation of MgZnO-based metal-semiconductor-metal ultraviolet photodetectors with nanomesh electrode
| Autor: | Heng-YuLin, 林恒裕 |
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| Rok vydání: | 2015 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 103 In this study, the nanosphere lithography technique and the oblique evaporation method were utilized to fabricate the high transmittance and low sheet resistance nanomesh electrode, and the high quality MgZnO-based films were deposited as the absorption layer using the vapor cooling condensation system to complete the MgZnO-based metal-semiconductor-metal ultraviolet photodetectors (MSM-UV-PDs). Compared with the high absorption property in the UV wavelength range of the transparent conductive films and the thin metal films, the nanomesh electrode possessed the advantages of the higher transmittance at the UV wavelength range owing to the about 10% of the metal coverage region of the nanomesh electrode on the MSM-UV-PDs device. To further investigate the function of nanomesh electrode, the various-size nanomesh electrode were applied on the MgZnO-based MSM-UV-PDs. Under the operating voltage of 5V, the responsivity at the wavelength of 330nm and the UV-visible rejection of the MgZnO-based MSM-UV-PDs with the nanomesh electrode were respectively promoted from 0.135 A/W and 1748 to 0.248 A/W and 2380 compared with the MgZnO-based MSM-PDs with the thin metal films. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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