Effect of capping carbon layer on grain partition of FePt films on MoC+C/CrRu/glass
| Autor: | Sheng-Chun Fu, 傅聖峻 |
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| Rok vydání: | 2015 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 103 Capping C layer with various thicknesses were sputtered on FePt/MoC/CrRu/glass at room temperature and post annealed from 190-365oC. The optimal magnetic property was obtained at 2 nm thick C layer annealed at 268oC and used to discuss FePt thickness effect. The FePt films with thickness of 4-10 nm were deposited on MoC/CrRu at 425oC by using magnetron sputtering. The MoC intermediate layer was epitaxially grown on the (200) textured CrRu seed layer and the FePt film was prepared on (200) textured MoC at 425oC. The FePt film shows strong (001) texture and out-of-plane coercivity of 7.5 kOe has been demonstrated in 10 nm thick FePt film. After capping 2 nm thick C layer and post annealed at 268oC, the out-of-plane coercivity was increased to 10 kOe in 6 nm thick FePt. From microstructure, the FePt grains were distributed in- or between- islands like structure and further separated by excess carbon from capping carbon layer and MoC intermediate layer. Thinner FePt film was more separated by excess carbon and shown higher coercivity. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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