Study on Precise Spraying Coating Process for Fabrication of Microstructures Device
| Autor: | Yu-Hsiang Huang, 黃郁翔 |
|---|---|
| Rok vydání: | 2015 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 103 Micro-structural elements are key parts of micro mechanical system, micro optics system, micro-electronic integrated component and biological micro electro-mechanical system. At present, there are many manufacturing technologies of micro-structural elements include hot embossing, UV imprint technology and micro injection molding etc. In order to differ from traditional production techniques, this study proposed a novel technology. By using spray coating with metal mask technology to fabricate microstructures array element. The integration technology has many advantages. Such as low temperature, low pressure and low cost. It is suitable to mass production of microstructures elements. First of all, the metal mask with micro-holes array pattern was fabricated by photo-lithography and wet chemical etching process. After that, the metal mask was placed on the plastic substrate to form a stack layer. Then, the stack layer of metal mask and plastic substrate was placed on the platform of spray coating machine. The polymer solutions were spray coating on the stack layer. After baking processing, the metal mask is separated from the plastic substrate. The microstructures array element on the plastic substrate is obtained. In this study, the effects of processing conditions on the shape and quality of formed microstructures elements are investigated. Finally, the Taguchi experimental study method was used to find out the better processing parameters to fabricate micro-structural elements. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
| Externí odkaz: |
|