Minimizing the total absolute deviation of completion time on a single machine with dust accumulation consideration

Autor: CUN-ZHI ZHANG, 張存智
Rok vydání: 2015
Druh dokumentu: 學位論文 ; thesis
Popis: 103
This paper considers wafer manufacturing of semiconductor where wafer cleaning should be taken to avoid pollution. The function of wafer cleaning is to clean up the dirt, i.e., particle, organic, and metal-lons on the surface of wafer. Thus, we deal with the problem of scheduling jobs and dirt clean-up based maintenance to avoid the loss of capacity. The machine has to be stopped to clean up the dirt once the accumulation of dirt on the machine is over a limited value.The objective is to minimize the total absolute deviation of completion time. This problem is strongly NP-hard. A mixed binary integer programming model is developed to optimally solve this problem. Furthermore, an efficient heuristic algorithm is proposed for solving large-sized problems. In this study, we have an integer programming model for the following problem:1│clean-up│TADC.Model uses binary variables to control whether the maintenance is carried or not. The large size problem is solved by the heuristic algorithm. The results showed that optimal solution is better than heuristic algorithm when p_i=∪[1,10] the average error is 4.35%;p_i=∪[1,100]the average error is 4.99% .
Databáze: Networked Digital Library of Theses & Dissertations