Uniaxial Straightness Error Compensation by Integrating Heterodyne Grating Interferometer and Precision Positioning Stage
| Autor: | Yu-ju Chu, 朱昱儒 |
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| Rok vydání: | 2014 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 102 This thesis focused on investigation of the horizontal straightness error measurement and compensation in a precision positioning system. The research presented a high-precision dual-stage positioning system combining an optical displacement measurement device, a phase demodulation circuit, and a real-time control system to compensate for the straightness error when the long-stroke stage performs positioning task. The presented dual-stage system consists of a motor stage for long stroke positioning and a precision positioning stage actuated by piezoelectric actuators. The straightness error is measured by heterodyne grating interferometer. In this research, first two precision positioning stages were adopted to verify the feasibility of the optical measurement system and control system. A piezo stage was applied to perform reciprocal motion to mimic the straightness error and another piezo stage was applied to compensate for this periodic error. After that the same system setup was implemented on a dual-stage positioning system for real straightness error compensation. A periodic command was injected to the long stroke stage and its straightness error was measured by the heterodyne grating interferometer. The precision positioning stage was applied to compensate for the error by using several control methods, including PI control, fuzzy control and repetitive control. The experimental results demonstrate that the straightness error can be effectively measured by the heterodyne grating interferometer and the control algorithms are useful to compensate the straightness error in the dual-stage positioning system. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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