Improvement of Thin Film Uniformity and Repeatability through a Laminar Flow Control in OLED Thermal Evaporation
| Autor: | Chun Ming Chao, 趙駿銘 |
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| Rok vydání: | 2014 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 102 Thermal evaporation is a well-developed technology widely used in OLED (organic light-emitting diode) of the thin film deposition processes. The organic materials are highly expensive with a low utilization rate of only 10% to 15%. Additionally, the instability and controllability of the deposition is also a concern on the production of OLED. These barriers will have to be overcomed in order to achieve a better yield in OLED mass production. This thesis explores the design of laminar flow plates (dual laminar partition) to improve the stability and controllability of the material deposition. Vapor is generated by the organic material heated in the crucible, and the main feature of the laminar plate is that it limits the vapor through the additional plates. This will ensure the vapor to acquire sufficient heat energy and maintain a stable vapor pressure on the substrate In typical OLED process, after the material is refilled through thermal evaporation, the film thickness distribution takes several days, and even so, it cannot maintain a stable film thickness distribution. The addition of dual laminar partition through experiments has proved to improve the film thickness distribution rate and also material utilization which in terms reduces the material waste. Additionally, steady state can be maintained on a long manufacturing period. Future research seeks to optimize the open-ratio of the plate for the optimum film thickness distribution and improves material utilization. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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