Growth of Zinc Oxide Nano-materials on (010)-LiGaO2 Substrate by Chemical Vapor Deposition
| Autor: | Mei-yi Lin, 林美宜 |
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| Rok vydání: | 2014 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 102 In this thesis，growth of zinc oxide (ZnO) nano-belts on (010)–LiGaO2 (LGO) substrates by a chemical vapor deposition (CVD) process. Argon and oxygen are used as the carrier gas and reaction gas. The mixture powders of ZnO and graphite are used as the reaction sources. Au-film on the LGO substrate is catalyst for growth zinc oxide nano-belts. Used to study the influence of the varied growth conditions, such as deposition time, reaction pressure, growth temperature, and other experimental conditions to study the growth of ZnO nano-belts impact. The surface morphology and crystal structure were analyzed using Scanning electron microscope (Scanning Electron Microscopy, SEM). Crystal quality of ZnO was investigated by X-ray diffraction (XRD). The growth mechanism were analyzed using transmission electron microscope (TEM). Furthermore, photoluminescence (PL), cathodoluminescence (CL) and Raman spectroscope (Raman) were used to study optical properties and the inner stress of the materials. The a-plane and m-plane ZnO nano-belts can be obtained at the growth parameters of 930°C, 30 torr, 5 minutes, and 50 sccm of Ar/O2, 0.3 mm of Au. And the growth mechanism for ZnO nano-belts is Vapor-liquid-solid (VLS) and Vapor-solid( VS) growth mode. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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