Properties of Cu Thin Films Grown by Sputter Deposition and Molecular Beam Epitaxy
| Autor: | Lin Tsu-Ching, 林子敬 |
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| Rok vydání: | 2014 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 102 Copper thin films have been grown on glass substrates by DC diode planar sputter and molecular beam epitaxy (MBE). The as-grown Cu films have been examined by atomic force microscopy. A positive correlation between the roughness and the thickness of thin Cu films is observed. On the other hand, real-time resistivity measurements of Cu films grown by MBE via Van der Pauw method reveal a dependence of resistivity on the film thickness. This dependence is then compared to known results predicted by theoretical models and from experimental data. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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