Graphical Porous Silicon Optical Sensing Element
| Autor: | Syu, Bo-Jhih, 許博智 |
|---|---|
| Rok vydání: | 2013 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 101 In this thesis, the main use of laser engraving machine, the porous silicon experiments graphical two thicknesses of 525 μm and 230μm P-type silicon, experimental preparation before the coupons will be clean, then the surface of the specimen with Blue Tape lamination on, laser engraving machine engraving graphics on Blue Tape, 5 each triangle, round, square, carved out of the basket empty graphics, The total area of each graphic shape are 3 mm2 of parallel electric current disparity under etching experiment and analysis. After the experiment, of record test piece under the UV lamp 254 nm and 365 nm bands of light irradiation, the color of the light of the excitation light, spectrum analyzer (Maple PL), observation of the luminescence of porous silicon in the graphic relative intensity and band distribution range, to observe the surface structure of graphics inside the porous silicon and then a scanning electron microscope (Scanning Electron Microscope, SEM), measurement using 3D surface profiler (3D Profile) structure and roughness and depth, then I-V measurement instrument, Four cases in fluorescent lamps, black box, halogen lamps, and UV light, etc. Electrical characteristic curve analysis progress. Specimen thickness of 230 μm, pattern is triangular, the concentration ratio of 1:2, the constant voltage, the time is 15 minutes resistance change, Due to the specimen thickness of 230 μm columnar, the thickness of the specimen will affect the structure of the porous silicon; different graphics under current the corner of the etching, lead to the corner of the porous silicon is less; etching concentration ratio of 1:2 porous silicon plate and columnar structure significantly, Etching a concentration of 1:3, only cracks The etching time was 15 minutes excited by the light intensity of light, in the future Laser engraving machine engraving more complex graphics can be used. Keyword : Laser engraving machine, I-V measurement instrument, Electrical characteristic curve. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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