Study and Fabrication of BaTi5O11 Dielectric Thin Films by Using Sol-gel Method
| Autor: | Che-Yu Chan, 詹哲宇 |
|---|---|
| Rok vydání: | 2013 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 101 Physical, optical and dielectric properties of the BaTi5O11 thin films were prepared by sol-gel method on Si substrates via using precursor sols of pH2 to 4 at different preheating and annealing temperature have been investigated. The diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. All films exhibited BaTi5O11 peaks orientation perpendicular to the substrate surface and the grain size with the increase in the annealing temperature. Optical transmittance spectroscopy further evealed high transparency in the visible region of the spectrum. The dependence of the physical and optical characteristics on various annealing temperatures was also investigated. Furthermore, the dielectric properties of BaTi5O11 thin film were also measured at microwave frequencies. It was found that the BaTi5O11 film grown at preheating 300℃ and annealing 900℃ by using pH3 precursor sols is the best process condition in this study. The εr and the dissipation factor of the BaTi5O11 film were about 24 and less than 0.05, respectively. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
| Externí odkaz: |
|