The Study of SAMs/SiO2 Stacked Sensing Membrane for ISFETs
| Autor: | Tzu-Nien Lee, 李子念 |
|---|---|
| Rok vydání: | 2013 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 101 In this thesis, the SAM/SiO2 stacked sensing membrane was used to improve the sensing characteristic of ISFETs. In our results, the sensitivity, hysteresis and drift of EIS with the SAM/SiO2 stacked sensing membrane were all improved. Besides, the sensitivity of ISFETs was also improved .This technology will be suitable for the future high sensitivity ISFETs. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
| Externí odkaz: |
|