The heuristic preemptive dispatching method forconveyor-based material handling of 450mm waferFabrication

Autor: DUONG MINH THAI, 楊明泰
Rok vydání: 2013
Druh dokumentu: 學位論文 ; thesis
Popis: 101
The transition to 450mm wafer manufacturing is already the real trend of semiconductor industry’s development. To handle the larger wafer size, the conveyor-based automated material handling system (AMHS) is considered as next generation transport. Moreover, the actual production indicates that there are the production lots of higher priority, which should enjoy the privilege of transportation on the shop floor because of either tough market completion or customer’s urgent requirements. However, there is no effective method for handling the prioritized lots for 450mm AMHS. Therefore, this research develops an effective dispatching rule, named the heuristic preemptive dispatching method (HPD) for conveyor-based AMHS to solve this critical limitation. Simulation results demonstrate that the HDP can provide better performances than the best existed method. The HPD rule reduces the average variable time by 147% for hot lots and 45% for normal lots. It can expedite the movement of lots and reduce the lot delivery time significantly with no additional investment of resources. This reduces the total investment capital for wafer manufacturing companies.
Databáze: Networked Digital Library of Theses & Dissertations