A study of fabrication process for the Cr-Si-N nanocomposite thin films on ABS plastic substrates
| Autor: | Lin, Yan-Ming, 林彥名 |
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| Rok vydání: | 2013 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 101 In this study, the Cr-Si-N nanocomposite thin films were prepared on plastic materials and silicon wafer substrate by a hybrid coating system, which includes cathodic arc evaporation, pulse DC magnetron sputtering and ion-assisted deposition components. The nanocomposite Cr-Si-N thin films with various Si contents have been achieved ranging from 0.6 at.% to 13.5 at.%. The XRD analysis showed that the stronger CrN peaks appeared when Si content was between 1.3 at.% to 5.1 at.%. The intensity of CrN peaks decreased when Si content increased up to 8.6 at.%. An amorphous broadening peak was found as the Si content reaching to 13.5 at.%. The XPS analysis of Cr-Si-N films indicated that the amorphous Si3N4 was found as Si content up higher than 5.1 at.%. The grain size of Cr-Si-N thin films decreased with increasing Si content. The columnar structure of thin films disappeared as Si content increased, and macroparticles and pin holes were found on the surface of each thin films. The chromaticity analysis of Cr-Si-N films indicated between 64 to 71. The hardness of Cr-Si-N thin films increased with increasing Si content and then decreased. A maximum hardness around 23.7 GPa in average was achieved for coatings with around 10.1 at.% Si content. A good adhesion and good nanowear resistance were found in the Cr-Si-N thin films with around 13.5 at.% and 5.1 at.% Si content respectively. The R.C.A abrasion test indicated that good resistance was found for the Cr-Si-N thin films. The Cr-Si-N thin films were failed after the falling sand abrasion teat. The forty-eight hours salt spray test indicated that the good corrosion resistance was found for each Cr-Si-N thin film. Keywords：Cr-Si-N nanocomposite thin film, cathodic arc evaporation, plused DC magnetron sputtering, ion-assisted deposition, plastic materials |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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