The Study of Laser Direct-write Patterning Method for ITO Thin Film

Autor:	Huang,Kuofeng, 黃國峰
Rok vydání:	2012
Druh dokumentu:	學位論文 ; thesis
Popis:	100 In this research, the laser direct-write patterning method is applied to the micromachining of ITO thin films on glass substrate. It is possible to complete the patterning process without damaging the substrate. The purpose of this study is to identify the proper processing parameters, namely the focal length, laser current and laser pulse duration. Observing the ITO insulation areas with a scanning electron microscope (SEM), we found that the patterning width was mainly determined by the laser current while the laser pulse duration had little effect. Larger laser current gave a larger patterning spot. Therefore, the laser power is an important parameter of patterning ITO films with laser direct write
Databáze:	Networked Digital Library of Theses & Dissertations
Externí odkaz:	http://ndltd.ncl.edu.tw/handle/ya9jq6 Zobrazit plný text záznamu