Applications of ZnO Films and Nanowires in Humidity Sensing
| Autor: | HONG-JUN CHEN, 陳泓鈞 |
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| Rok vydání: | 2012 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 100 Humidity sensors are fabricated using ZnO thin films and nanowires which grown via a vapor solid (VS) approach at various temperatures ranging from 400 °C to 700 °C to a comb type Pt interdigitated electrodes. Experiments were executed to observe the relationships between the structure, relative humidity (RH) and resistance of these devices fabricated under various VS temperatures. The ZnO thin films and nanowires grown at a temperature of 700 °C in using VS approach exhibits an optimum sensitivity to humidity. Thin film measured sensor resistance is from 1062.01×106 Ω to 0.214×106 Ω and nanowires' structure is from 856.177×106 Ω to 93×106 Ω for RH from 12% to 92%, respectively at room temperature (RT). On further discussion has compared with sensitivity, hysteresis and adsorption response time between the ZnO thin films and nanowires. Although nanowires' structure is rather poor on hysteresis, it has an optimum sensitivity in high humidity environment. The adsorption response time just need 15.2 seconds during the relative humidity for 33%~85%. This shows that a high sensitivity humidity sensor can be expected with the proposed method. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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