Preparation of polyimide-nanogold composite optical thin films and their lithography
| Autor: | YU-SHIEN LIU, 劉育憲 |
|---|---|
| Rok vydání: | 2011 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 99 This research was divided into three parts. In the first part, the photosensitive polyimide (PSPI) thin film was prepared based on 4,4-methylenebis-2,6-diethylaniline (TEMDA), 4,6-diamino-2-mercaptopyrimidine hydrate (DAMP), add 3,3’,4,4’-benzo- phenone-tetracarboxylic dianhydride (BTDA). The PSPI was patterned by lithography, and the patterns were observed by SEM and, respectively. In the second part, the gold nanoparticles (GNPs) adsorbed on the PSPI were conducted, Two different lithography processes were used: (1) The PSPI thin films were patterned by lithography, and then the GNPs were adsorbed on the patterns; (2) The GNPs were adsorbed on the PSPI thin films, and then the PSPI thin films were pattered by lithography. The patterns of the PSPI/Au composite thin films were characterized by SEM, EDAX, and a-step. The samples of the process (1) showed that the GNPs well dispersed on the patterns. However, the samples of process (2) showed that the unexposured PSPI were not removed completely. The GNPs were dispersed on the exposured and unexposured domains. In the third part, a composite thin film consisting of polyimide and GNPs was fabricated through layer-by-layer assembly. The stepwise growth of the films was confirmed by SEM, and GNPs were observed and well dispersed on the surface of the polyimide layer. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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