Development of Full-field Chromatic Confocal Surface Profilometry Using Digital Micro-mirror Device

Autor:	Hau-Wei Li, 李浩瑋
Rok vydání:	2011
Druh dokumentu:	學位論文 ; thesis
Popis:	99 In the research, full-field chromatic confocal surface profilometry employing digital micro-mirror device (DMD) for spatial correspondence is proposed to minimize lateral cross talks between individual detection sensors. Although full-field chromatic confocal profilometry is capable of enhancing measurement efficiency by completely removing time-consuming vertical scanning operation, its vertical measurement resolution and accuracy are still severely affected by the potential sensor cross talk problem. To overcome this critical bottleneck, a DMD-based chromatic confocal method is developed by employing a specially-designed objective for chromatic light dispersion and a DMD for lateral pixel correspondence and scanning. Using this method, the full width half maximum (FWHM) of the depth response curve can be significantly sharpened, thus improving the vertical measurement resolution and repeatability of the depth detection.
Databáze:	Networked Digital Library of Theses & Dissertations
Externí odkaz:	http://ndltd.ncl.edu.tw/handle/jfvgwb Zobrazit plný text záznamu