Design and Development of A Three-Axes Positioning System Using Piezo-Buzzer Actuators and Hall Sensors with Magnetic Ring Array
| Autor: | Ren-Feng Ding, 丁仁峰 |
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| Rok vydání: | 2011 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 99 Precision positioning systems are extensively used in Scanning Probe Microscopy(SPM), nano-scale processing system and other domains. Precision positioning systems provide precise position control for tool or work piece. Besides the pursuit of long-stroke and high-resolution, the intensive integration of actuator and sensor becomes key issue for widening application fields in more compact systems. Because of its small size, high actuation resolution and high dynamic characteristics, the piezoelectric element becomes the most widely used component of precision actuators. In order to realize our developed economical positioning system, the popular and inexpensive piezo buzzer is chosen to develop precision actuators instead of using expensive imported piezoelements. Through the inertial stick-slip driving principle, the piezo buzzer tangentially and reciprocally drives the precision screw mechanism to induce long-stroke and high resolution motion. For enhancing compact integration and avoiding loading effect of displacement senor, the Hall sensor and tiny magnets are utilized to develop noncontact incremental displacement measurement. The three-axis positioning system developed in this thesis consists of three sets of actuators with displacement sensors, which produce X-axis, Y-axis and Z-axis rotational displacements, respectively. Through our developed ingenious cross structure concept, three sets of actuators with sensors can be well configured on a same plane, thus effectively shrinking the system height to be adapted to any SPM-system for positioning measured sample. The maximum stroke for the X-axis and Y-axis actuators is 5 mm, and its average minimum step is about 0.53 nm, and its reciprocal step error is 0.03 nm. The maximum stroke for Z-axis rotational actuator is 360 degree, and its average minimum angular step is 0.25 degree. Below the resonance frequency of 2 kHz, the average step increases in proportion to frequency increment. For the Hall Sensor with the magnetic ring array, the linear displacement measurement resolution reaches 10 nm, and the angular displacement measurement resolution is about 0.02 degree. The maximum driving force of the linear actuator is 150 gf (=1.5 N ). |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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