Development and Application of Optical Inspection Technology
| Autor: | Chen, Yijui, 陳奕瑞 |
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| Rok vydání: | 2011 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 99 During the last few years, optical inspection technology has been developed with amazing results. Whether it is the optimal element or the thin-film, their surface roughness and recrystallization characterization can be tested using optical inspection technology. The aim of the thesis is to construct an optical path and focus on it and inspect it with a laser light source to reach the goal of non-destructive optical inspection that is fast and convenient to operate and can be applied in real-time measurement for on-line mass production. It is known that the power stability of the probe laser and the precision of the laser beam wander are the key factors that affect the accuracy of advanced thin-film optical inspection and that the size of the beam diameter directly affects the inspection range. These factors are the key points in evaluating whether the probe laser is capable of being used in the on-line precision thin-film optical inspection for long periods of time in the industrial field. Hence, five pinholes with different sized diameter were placed on the linear polarized He-Ne laser, which was used most often in on-line optical technology. The diameter size of the pinholes were 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm and 0.3×0.9mm2. A beam profiler was used to analyze the power stability and laser beam wander precision of different sized pinholes on the linear polarized He-Ne laser. The experiment result showed that the linear polarized He-Ne laser with a pinhole of 0.3mm diameter was suitable for use in precision thin-film optical inspection. However, the linear polarized He-Ne laser needed to be turned-on for at least half an hour before the precision thin-film optical inspection started. The experiment result obtained above was applied in the surface roughness results of TiO2 photocatalyst thin-film and silicon wafer. The trend equation and optimal measurement angle for optimal surface roughness prediction obtained was 60°. Later, the optical path of the probe laser was modified and a focusing lens was added on to improve the precision of the probe laser to be the same as the measurement range of a white-light interferometer. A white-light interferometer is mainly applied in the research and development of a fast optical inspection system for low temperature poly-silicon thin-film. The trend equation and optimal measurement angle for optimal surface roughness prediction obtained was 20°. Moreover, the bubble defect inspection of silicon molds was based on the waveform characteristics inspected. The waveform can truly determine whether if there was any bubble in the liquid silicon mold. The optimal measurement error of liquid silicon mold can be as little as 2.78%. Keywords: Optical inspection, Pinhole, TiO2, Surface roughness, Solar cell, Low temperature poly-silicon, Silicon, Rapid tooling technology |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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