Autor:	Cheng-Chou Lin, 林建州
Rok vydání:	2011
Druh dokumentu:	學位論文 ; thesis
Popis:	99 This research aims to develop instruments which can be effective in the detection of volatile organic gaseous compounds used in semiconductors in clean room that achieve desired ambient air quality. A portable monitor of volatile organic gaseous has been designed. It also combined 4mA to 20mA sensor interface for the PLC. The monitor can be used in fixed location monitoring.
Databáze:	Networked Digital Library of Theses & Dissertations
Externí odkaz:	http://ndltd.ncl.edu.tw/handle/22427604962718343368 Zobrazit plný text záznamu