Measurements and Analyses of MEMS Gyroscopes and Accelerometers
| Autor: | Kai-Hsin Chen, 陳凱鑫 |
|---|---|
| Rok vydání: | 2010 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 98 In the research of MEMS gyroscope, frequency matching is an important issue. In the High-Q condition, the bandwidth of resonance frequency is very narrow and the amplitude is very great.So the fabrication has to be accurate. Normally, there are several methods to solve this problem. One is in-operation tuning and the other one is broaden the operation bandwidth. In this thesis, we design a MEMS double-decoupled gyroscope with an enhanced operation bandwidth. There are three oscillators in drive and sense and they are orthogonal structure. Each oscillator is linked together by mechanical coupling beams, and we can broaden the operation bandwidth in drive and sense by coupling different modes. A U-shape proof mass and six orthogonal decoupling springs are used to connect drive unit and sense unit in order to prevent the interference. There are two experiments: One is the measurement of frequency response of drive and sense, and we indeed enhance the operation bandwidth and have a great frequency matching from the result. The other one is gyroscope experiment, we measure the voltage output versus angular rate. At the resonant frequency, voltage output is greater while angular rate is faster. On the other hand, at off-resonant frequency, output voltage doesn’t change while angular rate changes. We talk about how to analyze the data of micro accelerometers using hybrid sensing mechanism. The accelerometer can measure the acceleration by using capacitive sensing and piezoresistive sensing. Our goal is to measure acceleration with two ways of sensing and to reduce measurement error by mathematical method. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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