The interferometric phase measurement techniques and their applications on optical constant measurements

Autor: Jian, Zhi-Cheng, 簡志成
Rok vydání: 2009
Druh dokumentu: 學位論文 ; thesis
Popis: 98
High accuracy interferometric measurement techniques such as the phase shifting interferometry and the heterodyne interferometry can be applied to measure the phase shift of a polarized light beam or the phase difference between two orthogonal light beams in several interferometers. Substitute these data into the special equation derived from Fresnel equations or the equation used in the two-wavelength interferometry, the optical constants including the thickness and the refractive index of a material can be obtained. Firstly, the phase-shifting interferometry is applied to a modified Twyman-Green interferometer to measure the phase shifts of a polarized light beam due to the total internal reflection, and the two-dimensional refractive index distribution of the tested material can be obtained. Next, the optical configuration is improved and a microscopic objective is added, a cell contacted at the hypotenuse of a prism. The phase difference distribution between the s- and the p- polarized light due to the total internal reflection is measured similarly, and the transparent cell can be phase-imaged and displayed in grey-level. Then, a novel optical configuration combined the heterodyne interferometry and two-wavelength interferometry is designed to measure the thickness and the refractive index of a thick transparent plate. Finally, the heterodyne interferometry which is often suitable for one-point measurement is extended for two-dimensional measurement. Some simulations of different conditions are calculated iteratively, and an optimal condition is derived. Besides, they have several merits such as simple optical setup, easy operation, and rapid measurement.
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