Fabrication of Carbon Nanotube Gas Sensor Device Compatible with CMOS Processes
| Autor: | Po-Chih Chang, 張博智 |
|---|---|
| Rok vydání: | 2009 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 97 The study demonstrates the low temperature fabrication of CMOS compatible gas sensor based on CNTs. To begin with, the SIO2 on the silicon wafer was modified by APTS in order to form an aminoterminated (–NH2) self-assembled monolayer (SAM), which could facilitate the chemical bonding between CNTs and amino-groups. By means of it, CNTs were immobilized on SIO2 to be the thin film of gas sensing. Photolithography and Evaporato were then implemented to develop micro parallel electrodes. At last, Lift-off was used to complete the fabrication. In this study, we not only successfully apply the fabrication to the purpose of mass production, but also integrate it with CMOS circuits to achieve System on Chip (SoC). Moreover, from the experiment, laser trimming was proved to modulate the initial resistance of the gas sensors. The initial resistance of sensors ranged from a few hundred Ω to a few thousand Ω at room temperate. The difference of resistance resulted from the amount of CNTs which bridged the parallel electrodes and the material use of the parallel electrodes. Laser trimming could also be used to adjust the resistance of the array of CNT gas sensors. In the future, the sensors will be designed with the specificity of specific gas by modifying CNTs. Moreover, the sensors will be integrated with CMOS circuits for the purpose of wearable SoC. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
| Externí odkaz: |
|