Pulsed Laser Deposition of Cu2O Thin Films

Autor: Wei-Ming Chiu, 邱偉銘
Rok vydání: 2009
Druh dokumentu: 學位論文 ; thesis
Popis: 97
In this study, thin films of cuprous oxide were deposited on Al2O3 substrates by pulsed laser deposition technique. An Nd:YAG Q-switched laser operating at a wavelength of 266nm, a pulsed duration less than 10ns, and a repetition rate of 10Hz, was used to ablate a Cu2O target. The Target for the deposition was obtained by sintering high-purity CuO powder(99.999%) at 1000℃ for 5 hours. The effects of the growth parameters on the film morphology, roughness, crystallinity, and optical properties were systematically investigated. In addition, the effects of the target for PLD on the film qualities were also investigated in details. The X-ray diffraction results show that the structure of the films changes from Cu2O and CuO phase with the different parameters. In particular conditions, we proposed that the Cu2O thin films was the single crystal by X-ray diffraction. Finally, we also find the Cu2O thin films grown on a MgO films exhibits different structure.
Databáze: Networked Digital Library of Theses & Dissertations