Development of a real-time optical measuring system for the straightness and angular error of precision stage
| Autor: | Jing-Yao Huang, 黃俊堯 |
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| Rok vydání: | 2009 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 97 This paper proposed a novel online optical measurement method for straightness error and angular error of the stage. The proposed system is composed of a light emitting diode (LED) with un-visible light, a one-dimensional detector, a DVD pickup and a two-dimensional quadrant detector (QD). The proposed system can be used to measure the straightness error and the angular error of the linear moving stage and also can feedback the signal to compensate the straightness error of the stage by using controller unit. The high precise position system is constituted by using flexure structures. The piezoelectric unit is used for the actuator. The horizontal direction movement of the stage is provided by piezoelectric actuator. The proposed method exhibits advantages: (a) the structure is simple, measurement quick and easy to setup for online stage working and (b) the compensative technique can be used to reduce the straightness error of the linear moving stage. The proposed system is setup on the linear moving stage to measure the straightness error, angular error and to compensate the straightness error of the stage. The proposed measurement system is verified by the HP 5529A Laser straightness calibration system and the SIOS dual-beam interferometer angular calibration system. The online straightness error and angular error measurement signal is used to compensate the straightness error of the stage by using PI controller. The resolution of the straightness measurement is 0.06 μm. The resolution of straightness measurement of the stage is about ±0.25 μm |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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