Data Conversion Control in an Integrated TFT-LCD and Light Pen System
| Autor: | H. C. TAN, 譚鴻鈞 |
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| Rok vydání: | 2009 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 97 Semiconductor manufacturing equipments are extremely expensive equipments which control the process in semiconductor manufacturing. The equipments receive input commands from users and generate corresponding operations of manufacturing process. Most eight-inch semiconductor manufacturing equipments, which are made in 1970-1980, use a light pen with cathode ray tube (CRT) display as an input device. With the evolution of display technology, it is difficult to obtain CRT displays; on the contrary, it is easy to obtain film transistor liquid crystal displays (TFT-LCD), but TFT-LCDs cannot directly replace the old input devices (i.e., light pen and CRT display) in semiconductor manufacturing equipments, due to the different interfaces between TFT-LCD and the old input device. Therefore, how to connect the interface of TFT-LCD module and the interface of light pen and CRT subsystem such that the TFT-LCD can update the old input device in semiconductor manufacturing equipments is a critical issue on machine maintenance and equipment lifetime. In order to connect the interfaces among TFT-LCD, light pen and CRT modules, this paper presents two data conversion control schemes, namely, single-interruption data conversion and double-interruption data conversion. We use analyses and experiments to compare the performance of the single-interruption and double-interruption data conversion schemes. Experimental and numerical results show that the double-interruption scheme provides users with more precise control on input than the single-interruption scheme, and then successfully integrates TFT-LCD into the input interface on semiconductor manufacturing equipments. Finally, this paper uses low-cost microprocessors to implement a double-interruption based data converter. Keyword: Light pen, TFT-LCD, Semiconductor manufacturing equipment, Micro-processor, data conversion control |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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