Micro-laser engraving platform with imaging based real time tracking and positioning

Autor: Yuan-Cheng Tsai, 蔡源成
Rok vydání: 2008
Druh dokumentu: 學位論文 ; thesis
Popis: 96
This project employs the confocal plane imaging feedback optical setup to facilitate the positioning and alignment of the object (to be engraved) relative to the laser engraving beam. The pre-acquired images can be used as a template to fine adjust the targeted area on the object. In this way, misalignment in positioning the object can be highly reduced and the repetition of trial-and-error testing runs can be greatly reduced. The new function will speed up the engraving process while claiming higher precision simultaneously and resolution (spot width) down to less than 1μm. We set up two micro-laser engraving platforms. (1)Femtosecond micro-laser engraving system. (2) Nanosecond micro-laser engraving system. And we use those systems combine Scanning Electron Microscope (SEM)compare with femtosecond-and nanosecond micro-laser engraving in carbon nanotube.
Databáze: Networked Digital Library of Theses & Dissertations