The study of TiO2 film doped nitrogen for photocatalytic performance
| Autor: | Shih-Min Lin, 林世明 |
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| Rok vydání: | 2008 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 96 The aim of this project is to investigate the doped nitrogen titanium dioxide which is fabricated by unbalanced pulse magnetron sputtering system. HSS substrates and quartzes are coated with film by PVD method. Using titanium metal target, nitrogen, argon and oxygen gas produced doped nitrogen titanium dioxide thin film. For combining different compound, we hold the argon and oxygen gas flow rate and design parameters to change the nitrogen gas flow rate. To observe different nitrogen content will influence the crystalline structure, film absorption reaction and photo catalytic effect. We divided this project into three stages to finish it:First of all, to set parameters of compound and analyze basic properties: We find the better sputtering current parameter by changing current of titanium target and control the suitable flow rate of argon and oxygen gas. Finally to pour different nitrogen flow rate into chamber combined four coating films, respectively. SKH51 substrates and quartzes are coated with doped nitrogen titanium dioxide. Since let these samples divide into four groups for heated treatment. We can know the nitrogen content and sintering will influence crystalline structure, micro scale structure and content ratio. Afterward we measure coating adhesion by scratching tester.Second of all, film absorption properties and establish mechanism:The different nitrogen content and heated treatment temperature have distinct photon absorption properties. Using spectrum knows transmittance and absorption of coatings. Afterward we can calculate the energy band gap by Tauc-plot and know the influence of nitrogen content.Final of all: Photocatalytic effect: The main application of titanium dioxide is oxidization. It can decompose dirt is due to oxidation. We can see decomposition and antiseptic effect by methylene blue discoloration and MRSA (methicillin resistant Staphy`lococcus aureus). To observe that nitrogen content and heated treatment temperatures affect photocatalytic effect. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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