Investigation on Properties of Transparent Conductive Strontium Copper Oxide Film by RF Magnetron Sputtering System
| Autor: | Jui-wen Liu, 劉瑞文 |
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| Rok vydání: | 2008 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 96 The main purpose of this study is to investigate the feasibility of depositing the strontium copper oxide (SCO) films by the radio frequency magnetron sputtering system. Structural, electrical and optical properties of these films were studied. The SCO films were first deposited with different combinations of Ar and O2 gas on glass substrates at room temperature, and then annealed in O2 atmosphere at different annealing temperature. Grazing incidence angle x-ray diffraction (GIAXRD) analysis showed that SrCu2O2 structure was achieved when oxygen flow was raised above 10 sccm, while the total working pressure was kept at 4.0x10-1 Pa. Both carrier density and resistivity of the film varied with oxygen partial pressure. The optimum optoelectrical properties appeared on the films deposited under pure O2 atmosphere. The carrier density of the films was increased as increasing of oxygen flow rate, but the variation in carrier mobility shown an opposite trend. The carrier density and resistivity of the film prepared with 20 sccm oxygen flow were 2.89x1021 cm-3 and 6.64x10-2 Ω·cm, respectively. The carrier mobility was 0.092 cm2 V-1s-1 and the Hall coefficient measured at room temperature indicated that the conduction was p-type. The optical transmittance in the visible range 550 nm was 29%~41%. Then, the as-deposited films with the best optoelectrical properties were chosen to annealed at different temperatures ranging from 100℃ to 450℃ in an oxygen atmosphere controlled at 1.01×105 Pa. Results showed that the resistivity decreased as the annealing temperature raised from 100℃ to 350℃, and then increased when annealed at 450℃. Carrier density of an annealed film increased to 1.21x1021 cm-3 as the annealing temperature increased. Results also showed that the resistivity of a SCO film was correlated to the carrier mobility; the highest carrier mobility observed by annealing a SCO film at 350℃ was 4.0x10-5 m2V-1S-1. The optical transmittance of an annealed SCO film in the visible range at 550 nm fell between 52.6% and 58.2%. The Hall coefficient measured at room temperature indicated the nature of the as-deposited and annealed films were both p-type. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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