Effect of nitrogen flow rate on the mechanical properties of ZrN thin films
| Autor: | Yung-Chih Chou, 周永志 |
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| Rok vydání: | 2008 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 96 Study of ZrN thin films coatings deposited on steel substrates (SKD11) at different nitrogen partial pressures using reactive DC magnetron sputtering. Study of Mechanical and trbological properties are on annealing fore and aft in different nitrogen rates. The films crystal structure was identified by X-ray diffraction (XRD) method, SEM to study the microstructures and AFM to study the surface roughness, thickness is measured by a stylus profiler (XP-2 stylus profiler). Nanoindentation test to study the microhardness value and Young’s modulus, Pin-on-disk wear test to study the friction coefficient. The XRD study shows that under nitrogen rates films present have crystallization of ZrN peak as (111),(200) in opposite to over nitrogen rates films which become more and more amorphous of ZrN peak as the nitrogen flow increases beyond 4sccm. On mechanical properties, Young’s modulus and microhardness value are advancement on after annealing at 400℃. After the pin-on-disk test wear test, found the best friction coefficient versus nitrogen flow 32sccm of ZrN thin films. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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