A Study of CMOS MEMS Piezoelectric Inkjet Head
| Autor: | Chih-Cheng Lee, 李志程 |
|---|---|
| Rok vydání: | 2007 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 95 In this thesis, we present a novel fabrication process of nano-droplet generator and micro-nozzle by CMOS process with post-process technique of MEMS. This generator includes two sections：First, we use oxide layers and metal layers to structure main body which was etched to release micro channels, cavities and holes. Furthermore, CMOS MEMS process produces the backflow control channel, pressure chamber and inlet cavity. Second, micro electroforming was combined with newly piezo-material deposition method, namely Aerosol deposition method, to compose the actuator. Therefore, in this research, we use ANSYS to inspect the feasibility of CFDRC. We analyzed the dielectric loss and dielectric constant of piezoelectric material with rapid thermal annealing in the vacuum condition. Finally, the droplet generator is composed of the CMOS chip and actuator after aligning and bonding with mask-aligner apparatus. In the future, we perhaps insert the driving-wave generator of CMOS circuitry to achieve monolithic chip integrated system. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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