Development of a large measurement range ultra precision with topography machine
| Autor: | Yu-Cheng Lin, 林佑整 |
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| Rok vydání: | 2007 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 95 The purpose of this study is to develop a large measurement range ultra precision with topography with advantages of low cost and high precision. The measurement system is consisted of Piezo Ceramic Linear Moter (PCLM), X/Y axis microstep motor, and contact probe with sensor, and a PC with Borland C++ Builder is used to write control measurement software for system integration. The contact probe is designed with a cross-form frame bar, which has slender rod on all four ends. Commercial stylus is used and affixed at the end of lead cylinder, which is positioned at the center of the cross-form frame bar. The two sides of the lead cylinder are designed with a fixed structure and Vee grove structure. A roller and two univesal balls support the lead cylinder at interval of 120° by surrounding the center of the lead cylinder. The probe is limited to move toward Z-axis. The sensor of the contact probe is made with an optical displacement sensor modified from a pick-up head inside DVD player available on the market. The measurement principle of this study is that when the stylus tip of the contact probe is touches the object surface, the contact force would be passed to the suspension structure via the lead cylinder, and the cross-form frame bar inside the suspension structure generates vertical displacement. Then the optical displacement sensor would generate a focus error signal, and move the contact probe driven by program judgment, so that the contact probe always moves along the surface profile. At the same time, the coordinates of PCLM are recorded by a linear scale, and are used to obtain the profile data of objects. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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