A High Speed Servo Design for AFM Nano-machining
| Autor: | Hsu-Yu Chang, 張旭佑 |
|---|---|
| Rok vydání: | 2007 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 95 This thesis first time demonstrated the use of scanning probe microscope (SPM) lithography for three-dimensional nano-machining. The previous researches have applied different AFM tip forces to produce scraping marks with different depths. Our previous study also showed the need of high performance servo to produce even scraping marks. In this thesis, we first introduced the procedure for high performance tip servo design. The results with different servo controllers showed a dramatic difference when the controller was not properly tuned. The system was then used to produce square marks at different depths. With the limited working depth for the SPM lithography, our experiments showed very clear distinction among the different depth marks. With very careful tool path design, we showed how to machine slanted surfaces and eventually the machining of a pyramidal structure. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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