The Characteristic and Application of Ion Beam Alignment to Diamond-Like Carbon

Autor:	Chung-Yao Huang, 黃仲堯
Druh dokumentu:	學位論文 ; thesis
Popis:	95 In the conventional process of LCD panel fabrication, the alignment layer（Polyimide）was usually made by rubbing method, however, there were some drawbacks of this procedure including scratches, debris and ESD. The study is the alignment layer made of diamond-like carbon by the non-contact-type ion beam alignment technology in order to improve the quality of LCD product.According to these results, it is apparent that the voltage holding ratio higher than 97%, the residual direct current lower than 500mV and the anchoring energy higher than 1.0×10-5 J/m2 were obtained when the alignment layer made by the ion beam alignment technology. In contrast with traditional PI-rubbing technology, the DLC-IBA technology is a remarkable method to obtain better quality and higher yield of product. Key word：ion beam alignment, diamond-like carbon.
Databáze:	Networked Digital Library of Theses & Dissertations
Externí odkaz:	http://ndltd.ncl.edu.tw/handle/59956579237660256934 Zobrazit plný text záznamu