Controller Design of Long-Range Nano Positioning System
| Autor: | Shi-xian Wang, 王世賢 |
|---|---|
| Rok vydání: | 2005 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 93 Due to the rapid development of semiconductor industry and biochemical technology, the submicron manufacturing facilities have become the important developing objects. The manufacturing accuracy of some products has required the nanometer precision. The precision stage is the important tool for precision manufacturing, precision measurement, and the inspect technique. Usually, the piezoelectric-actuator is chosen to design precision positioning system for achieving the micro or nano position. However, their motion range is only 100 micrometers. Hence, how to develop a long range nano postioning stage is an important research topic. Here, a long-range nanometer precision positioning sevro system with AC servo motor and ball screw mechanism is built. Three kinds of Model-Free controller are designed to control the step response positioning. They are PID, Fuzzy logic, and Fuzzy Sliding Mode controllers. Different step response is set to investigate the accuracy and system stability of this servo system. The maximum stroke can reach 30cm and the accuracy is less than 60 nm. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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