The Fabrication and Characterization of (Pb,Ca)TiO3 Pyroelectric Thin Film Infrared Array Thermal Image Sensors
| Autor: | Yung-Cheng Lai, 賴勇成 |
|---|---|
| Rok vydání: | 2005 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 93 This research used the radio-frequency sputtering methods to deposit lead titanate thin film with different calcium contents on Pt/Ti/SiO2/Si substrates to form Pb1-xCaxTiO3(PCT)(X=0,0.25,0.3,0.4,0.5) thin film. The PCT thin film were added with different calcium contents and underwent annealing with temperature changes to probe the influence of the process parameters on the thin film. Further investigations include the property analysis of PIR thermal image sensor etched as V-groove structure and research on the thermal image. From the PCT thin film material analysis, we found out that it has better perovskite structure when annealed at 650�aC for 15 minutes. For the analysis of PCT thin film electrical properties, the relative permittivity and pyroelectric coefficient of PCT thin film all shows a tendency to increase when the calcium contents are increased. The coercive field and remnant polarization decrease as the calcium contents increase. When the pyroelecytric materials of the PIR sensor is PCT(30), it has maximum voltage response at 678.9(VW-1) and maximum specific detectivity at 0.299 107cmHz1/2W-1. This findings were successfully applied in producing 8X8 array PIR thermal image sensors. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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