Fabrication of PZT-based biosensor with sol-gel process
| Autor: | Chiahui Chen, 陳佳慧 |
|---|---|
| Rok vydání: | 2005 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 93 In recent years, the superior piezoelectric performance of lead-zirconate-titanate （PZT，PbZrxTi1-xO3） ceramic materials were applied for microelectro-mechanical-systems（MEMS）intensively. We deposited 0.6μm PZT piezoelectric thin film on silicon wafer, and applied piezoelectric property of PZT for sensing biological material. Sol-gel method was used to fabricate PZT piezoelectric thin film in current study. A PZT-based ceramic thin film resonator was constructed into a biosensing device. The resonator was capable of detecting 10-11g with resonance frequency shift of 36.80Hz. We have demonstrated that ceramic resonator is a potential biosensing device for genomic application. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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