The tool portfolio analysis for semiconductor fab using simulation-based heuristics
| Autor: | Chih-Ping Hsu, 許治平 |
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| Rok vydání: | 2005 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 93 The characters of the manufacturing system in semiconductor manufacturing are high-cost of equipment, plenty of manufacturing procedure, and complex of tool portfolio. Tool portfolio planning is a capacity planning with making decision of the category and quantity of machines in a wafer fab according to the technology and demand of product. There are usually more than one hundred different kinds of machines in a fab. According to hundreds of machines and complex of manufacturing procedure, the over-investing for tools under a fab where releasing amount of wafer is fixed will raise let machines idle, sit on capital and not be helpful to the throughput. On the other hand, the lack of investment for equipments will result in the insufficient throughput, the lost of benefit and terrible performance of manufacturing. The last researches generally probe into the case of the performance of manufacturing caused by management and factors of system. Less research does that case focus on the decision of tool portfolio. Therefore this thesis is to develop a simulation-based heuristics to adjust the tool portfolio in order to make the most beneficial decision about tool portfolio and manufacture sufficient throughput. The goal of this research is to find out many different tool portfolios by arrangement in pairs of the adjustment of tool portfolio and the choices of bottleneck according single product in fab. These tool portfolios would be analyzed and compared with some performance index, including investment, utility function and inference by changing input of material. These performance indices are cycle time, average work in process, queuing delay, throughput and the utilization of individual tools. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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