Development and Application of Organic/Inorganic Multilayer Coatings on Plastic Substrate
| Autor: | HAN-BIN LIN, 林漢斌 |
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| Rok vydání: | 2005 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 93 Flexible organic light-emitting displays (FOLEDs) are considered as the next generation display technology. This is because that the FOLEDs are thinner, lighter, robust, and can be rolled away when not required. However, like many new future technologies, a lot of technical problems have to be resolved such as those related to encapsulation and the barrier performance of the polymeric substrates. Especially, both the water and oxygen vapors can oxidize the metallic cathode, which will reduce the electron injection in the OLED structure and thereby drastically decreases its performance. Therefore, the effective gas barrier films have to be deposited on plastic substrates in order to solve these problems. In this study, we tried to deposit organic/inorganic multilayer on polycarbonate (PC) substrate for gas barrier application of OLED. SiNx thin films deposited by plasma-enhanced chemical vapor deposition were as inorganic layer, and parylene thin films were as organic layer. The effects of different process parameters including flow ratio, chamber pressure, rf power density, temperature, and thickness for single SiNx film were discussed. The results of deposition rate, surface morphology, adhesion, water vapor transmission rate (WVTR) and oxygen transmission rate (OTR) were used to determine the optimum processing parameters. Finally, a multilayer barrier structure consists of the SiNx and parylene thin films were deposited to further reduce to permeation data. A calcium test was developed to measure the permeation property when the WVTR decreased to a level below 10-2 g/m2/day. From the experimental analyses, it is confirmed that the nitride/parylene barriers can prevent water and oxygen permeation effectively. Under optimum conditions, the WVTR of PC substrate can be reduced to 4.2×10-4 g/m2/day after coating a three-pair parylene/SiNx multilayer structure. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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