The Study of Two-DimensionalMicro/Nano -Positioning-Stage with a Novel Compliant Linear-Motion--Guiding Mechanism

Autor: Yu-may Chen, 陳玉美
Rok vydání: 2005
Druh dokumentu: 學位論文 ; thesis
Popis: 93
Along with the fast growing of the semiconductor, photonics, biotechnology and nanotechnology industry, ultra-precision positioning stages are becoming more and more necessary. In recent years, the technology of ultra-precision positioning stages had increasingly progressed with this demand. Flexure mechanisms have been commonly used in the design of ultra-precision positioning stages as bearings to provide smooth and guided motion. Ultra-precision positioning stages with high displacement resolution and long traveling range are becoming increasingly popular in industrial applications. For the present, the traveling range of most of flexure mechanism positioning stages seems can not satisfy the demands of the high-tech industrial applications. In this study, we discuss the design and characterization of a piezo-driven positioning stage with a monolithic flexure mechanism. During the designing stage, the static analysis of the positioning stage was executed with the ANSYS software, and compared with the design of the other existing flexure mechanism positioning stages. The prototype of the positioning stage was fabricated through precise wire Electro-Discharge Machining (wire-EDM ). In this study, finally, a sing axis long traveling range positioning stage prototype and the design of two axis positioning stage had been carry out. This sing axis positioning stage’s dimensions is 100mm x 100mm x 12mm, and the two axis positioning stage’s dimensions are 100mm x 100mm x 24mm. As the result of teste the travelling range of the positioning stage had been verified to be 928μm, The ratio of traveling range to the dimensions of this positioning stage’s is five times than those of other existing flexure mechanism positioning stages.
Databáze: Networked Digital Library of Theses & Dissertations
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