A Study of 5 DOF Piezoelectric Microstage
| Autor: | C. J. FU, 傅建榮 |
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| Rok vydání: | 2005 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 93 In recent years, the industry’s and academia’s engagement in the research of micro platform technology have driven the improvement of this technology in relevant industries. As the precision optical machinery evolving, the required precision has increased year after year following the maturity of the technology. And, orientation technology is to play an even greater indispensable role in precision optical machinery. This article focuses on the design and development of piezoelectricity-driven, and probes into the amplifying mechanism and the parallel mechanism of the platform. This research adopts the piezoelectric actuator to make up a mechanism to amplify the displacement of the piezoelectricity actuating device. The design of the platform also undergoes limited ultimate analysis. Later obtained the corresponding relation between voltage and displacement in the experiment, utilized the amount quantity of LVDT to examine and obtained every axle displacement changing amount and the value of the platform, then compared with the simulation figures to find out their differences. This research utilize PZT piezoelectric actuator to complete the necessary drive mechanism. Due to PZT has the advantages of high thrust, high resolution and short reaction time, it was cooperated with parallel movement of the piezoelectric actuator to carry on the movement of axial motion to accomplish the goal of precise movement. After finishing the design, utilize line cut to process each mechanism, and later take measurements which generated experiment results. The rate of amplifying mechanism is five times of displacement quantity. In platform, the move amplifying rate of X axle can be as high as 1.5 times; Y axle, 3 times; and Z axle, 5 times. The rotation axis even reach 0.839°. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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